The University of Southampton
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Publications

Zeimpekis, Ioannis, Sari, Ibrahim and Kraft, Michael (2012) Characterization of a mechanical motion amplifier applied to a MEMS accelerometer Journal of Microelectromechanical Systems, pp. 1-11. (doi:10.1109/JMEMS.2012.2196491).

Sari, Ibrahim, Zeimpekis, Ioannis and Kraft, Michael (2012) A dicing free SOI process for MEMS devices Microelectronic Engineering, 95, pp. 121-129. (doi:10.1016/j.mee.2012.02.004).

Banakar, Mehdi, Aghdaei, Sara, Boden, S.A., Sari, Ibrahim and Bagnall, D.M. (2012) Silicon nanowires by self-organised reactive ion etching At 8th Photovoltaic Science Applications and Technology Conference, United Kingdom. 02 - 04 Apr 2012.

Wood, Graham, Zhao, Chun, Pu, Suan Hui, Sari, Ibrahim and Kraft, Michael (2015) Sensor based on the mode-localization effect in electrostatically-coupled MEMS resonators fabricated using an SOI process At 14th IEEE Sensors Conference, Korea, Republic of. 01 - 04 Nov 2015. (doi:10.1109/ICSENS.2015.7370338).

Wood, Graham, Zhao, Chun, Pu, Suan, Boden, Stuart, Sari, Ibrahim and Kraft, Michael (2016) Mass sensor utilising the mode-localisation effect in an electrostatically-coupled MEMS resonator pair fabricated using an SOI process [in special issue: Micro/Nano Devices and Systems 2015] Microelectronic Engineering, 159, pp. 169-173. (doi:10.1016/j.mee.2016.03.035).

Wood, Graham, Zhao, Chun, Pu, Suan Hui, Sari, Ibrahim and Kraft, Michael (2016) An investigation of structural dimension variation in electrostatically-coupled MEMS resonator pairs using mode-localization IEEE Sensors Journal, 16, (24), pp. 8722-8730. (doi:10.1109/JSEN.2016.2573850).

Contact

Telephone: +442380592650

Email: is2@ecs.soton.ac.uk

Fax: +44 (0) 23 8059 3029

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