The University of Southampton

Thick-film piezoelectrics for MEMS: Optimisation and Applications

Materials & Technology, MEMS, Sensor Technology

This is an EPSRC Advanced Fellowship for Dr Steve Beeby to continue his research in the development and optimisation of active thick-film materials. The project is particularly concerned with the application of such thick-film materials to MEMS devices and this research has close links with other ECS projects (microfilter and sensors for prosthetic hands).

Primary investigator

Associated research groups

  • Electronic Systems and Devices Group
  • Electronics and Electrical Engineering
Share this project FacebookGoogle+TwitterWeibo

We use cookies to ensure that we give you the best experience on our website. If you continue without changing your settings, we will assume that you are happy to receive cookies on the University of Southampton website.