The University of Southampton

Resonant Nano-Electro-Mechanical Sensors for Molecular Mass-Detection

MEMs and NEMs

Silicon-based Nano-Electro-Mechanical (NEM) sensors are getting increasing interest because of their compatibility with “In-IC” integration as well as high sensitivity to a change in mass. The NEM sensors enable to detect a small amount of biological or chemical molecules thanking to their nanoscale dimensions and sensitive frequency response. This project presents design of a newly-proposed In-Plane Resonant NEM (IP R-NEM) sensor based on a mass-detection principle and discusses its extremely high mass sensitivity in comparison with present-day mass-detection-based biosensors. Our resonator architecture has amplified output signal due to the integrated lateral FET and can be realized by a top-down process on SOI substrates, which is expected to enable monolithic integration of the NEM sensors with CMOS ICs. This project is financially supported by EUFP7 project NEMSIC (Hybrid Nano-Electro-Mechanical/Integrated Circuit Systems for Sensing and Power Managemant Applications).

Primary investigators


  • EPFL
  • TUDelft
  • Honeywell
  • Univ. of Geneva

Associated research groups

  • Nano Research Group
  • Southampton Nanofabrication Centre
Share this project FacebookGoogle+TwitterWeibo

We use cookies to ensure that we give you the best experience on our website. If you continue without changing your settings, we will assume that you are happy to receive cookies on the University of Southampton website.