Title: The application of Aluminium Nitride in Micro-Opto-electro-mechanical system
Abstract: Recent years have witnessed a series of development at Microelectromechanical systems(MEMS) as well as Micro-Opto-Mechanical Systems (MOMS). The MEMS have been widely commercially applied into every part of people’s daily life. For example, accelerometers, microphones, and micro-scale energy harvesting. On the other hand, coherent optical systems combined with micromechanical devices may enable development of ultra-sensitive force sensors and quantum information processing. Due to the great optical , electrical and mechanical characteritics of Aluminium Nitride, it is possible now to combine all the advantages of these systems. My research will be focused on using AlN to build various systems, such as optical modulator and even on-chip laser.